Book chapter
Equipment and Instrumentation for Liquid Phase Epitaxy
Liquid Phase Epitaxy of Electronic, Optical and Optoelectronic Materials, pp 85-108
13 Jul 2007
Featured in Collection : UN Sustainable Development Goals @ Drexel
Abstract
This chapter contains sections titled:
Introduction
Overview, general description and operation of horizontal slideboat LPE system
Crucibles and slideboats
Alternative slideboat designs
Furnaces and heating
LPE ambient
Tubes, sealing and gas handling
Controllers and heating
Temperature measurements and other instrumentation
Safety
Production LPE systems
References
Metrics
6 Record Views
12 citations in Scopus
Details
- Title
- Equipment and Instrumentation for Liquid Phase Epitaxy
- Creators
- Michael G MaukJames B McNeely - 259 Beverly Rd., Newark, Delaware, USA
- Contributors
- Peter Capper (Editor) - Sensors (United States)Michael Mauk (Editor) - University of Pennsylvania
- Publication Details
- Liquid Phase Epitaxy of Electronic, Optical and Optoelectronic Materials, pp 85-108
- Publisher
- John Wiley & Sons, Ltd; Chichester, UK
- Number of pages
- 24
- Resource Type
- Book chapter
- Language
- English
- Academic Unit
- Engineering Technology
- Web of Science ID
- WOS:000267390700004
- Scopus ID
- 2-s2.0-84880148937
- Other Identifier
- 991020623910004721
UN Sustainable Development Goals (SDGs)
This publication has contributed to the advancement of the following goals:
InCites Highlights
Data related to this publication, from InCites Benchmarking & Analytics tool:
- Web of Science research areas
- Engineering, Electrical & Electronic
- Materials Science, Multidisciplinary
- Optics