Pb(Zr.52Ti.48)O3 Thin Films on Metal Foils by RF Magnetron Sputtering

Book chapter

Suk‐Hun Choi, Wan Y Shih, Jeong W Yi, Y. H Lee and Wei‐Heng Shih

Morphotropic Phase Boundary Perovskites, High Strain Piezoelectrics, and Dielectric Ceramics, pp 497-506

01 Mar 2006

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dielectric constant

ferroelectric thin film

magnetron sputtering

silicon substrate

x‐ray diffraction pattern

This chapter contains sections titled: Introduction Experimental Procedure Results Conclusion

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Title: Pb(Zr.52Ti.48)O3 Thin Films on Metal Foils by RF Magnetron Sputtering
Creators: Suk‐Hun Choi - Department of Chemical Engineering, Drexel University
Wan Y Shih - Drexel University
Jeong W Yi - Drexel University
Y. H Lee - Drexel University
Wei‐Heng Shih - Drexel University
Contributors: Ruyan Guo (Editor) - Pennsylvania State University
K.M Nair (Editor) - E.I. duPont de Nemours & Co. Inc
Winnie Wong‐Ng (Editor) - National Institute of Standards and Technology
Amar Bhalla (Editor) - Pennsylvania State University
Dwight Viehland (Editor) - Virginia Polytechnic Institute
D Suvorov (Editor) - Jozef Stefan Institute
Carl Wu (Editor) - U.S. Naval Research Lab
S.‐I Hirano (Editor) - Nagoya University
Publication Details: Morphotropic Phase Boundary Perovskites, High Strain Piezoelectrics, and Dielectric Ceramics, pp 497-506
Publisher: John Wiley & Sons, Inc; Hoboken, NJ, USA
Number of pages: 10
Resource Type: Book chapter
Language: English
Academic Unit: School of Biomedical Engineering, Science, and Health Systems; Materials Science and Engineering
Other Identifier: 991019203445704721