Book chapter
Plasma-Enhanced Chemical Vapor Deposition
Medical Coatings and Deposition Technologies, pp 495-530
01 Jan 2016
Featured in Collection : UN Sustainable Development Goals @ Drexel
Abstract
Plasma-enhanced chemical vapor deposition (PECVD) utilizes the electromagnetic excitation of vapor phase precursors to generate a cold plasma and induce reactions that lead to the formation of solid thin films. Due to the reactive nature of the process, a variety of precursors, including reagents that are generally considered chemically inert, can be activated to derive film-forming species. As such, PECVD is a versatile technique that has found many uses in biorelated applications. Importantly, PECVD presents a unique set of processing considerations that can have a significant impact on resulting film material structure and properties. These include the plasma configuration, plasma chemistry, and plasma electric field, which can influence, as respective examples, the photocatalytic activity and antimicrobial efficacy of titanium dioxide, the hybridization cycling stability of DNA or stem cell differentiation on ultrananocrystalline diamond, and the alignment and placement of carbon nanofibers as neural electrode arrays. These examples further illustrate the possibility and utility of PECVD in creating 3D structures beyond the conventional 2D planar thin films typically associated with these techniques.
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Details
- Title
- Plasma-Enhanced Chemical Vapor Deposition
- Creators
- Kenneth K. S. Lau - Drexel University
- Contributors
- D A Glocker (Editor)S V Ranade (Editor)
- Publication Details
- Medical Coatings and Deposition Technologies, pp 495-530
- Publisher
- Scrivener Publishing Llc; BEVERLY
- Number of pages
- 36
- Resource Type
- Book chapter
- Language
- English
- Academic Unit
- Chemical and Biological Engineering
- Web of Science ID
- WOS:000473622900015
- Scopus ID
- 2-s2.0-105009184930
- Other Identifier
- 991019292128404721
UN Sustainable Development Goals (SDGs)
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InCites Highlights
Data related to this publication, from InCites Benchmarking & Analytics tool:
- Web of Science research areas
- Engineering, Biomedical
- Materials Science, Biomaterials
- Materials Science, Coatings & Films