Book chapter
Silicon, Germanium and Silicon‐Germanium Liquid Phase Epitaxy
Liquid Phase Epitaxy of Electronic, Optical and Optoelectronic Materials, pp.109-178
13 Jul 2007
Featured in Collection : UN Sustainable Development Goals @ Drexel
Abstract
This chapter contains sections titled:
Introduction and scope of review
Historical perspective
Basis of silicon and germanium LPE
Silicon LPE methods
Solvent selection
Low‐temperature silicon LPE
Purification of silicon for solar cells in an LPE process
Electrical properties of LPE‐grown silicon
LPE of Si‐ and Ge‐based alloys
Selective LPE and liquid phase ELO
Solar cells
Other applications of silicon and germanium LPE
Conclusions and outlook
References
Appendix 1. Phase equilibria modeling: The silicon‐metal liquidus
Appendix 2. Impurities and doping in silicon LPE
Appendix 3. Effects of oxygen and water vapor in Si LPE
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Details
- Title
- Silicon, Germanium and Silicon‐Germanium Liquid Phase Epitaxy
- Creators
- Michael G Mauk - University of Pennsylvania
- Contributors
- Peter Capper (Editor)Michael Mauk (Editor) - University of Pennsylvania
- Publication Details
- Liquid Phase Epitaxy of Electronic, Optical and Optoelectronic Materials, pp.109-178
- Publisher
- John Wiley & Sons, Ltd; Chichester, UK
- Number of pages
- 70
- Resource Type
- Book chapter
- Language
- English
- Academic Unit
- Engineering Leadership and Society/Engineering Technology
- Identifiers
- 991020623911604721
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InCites Highlights
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- Web of Science research areas
- Engineering, Electrical & Electronic
- Materials Science, Multidisciplinary
- Optics