Conference proceeding
Atmospheric Pressure DC Plasma Microdischarges: A Characterization Study
Heat Transfer: Volume 3, v 2003, pp 325-334
01 Jan 2003
Abstract
Atmospheric pressure dc plasma microdischarges were generated between a thin cylindrical electrode and a flat surface. The glow discharges were characterized both experimentally and numerically. As the applied voltage is increased, the plasma potential in the plasma microdischarge remains constant while the plasma current increases proportionally. For the types of electrode materials and the range of the electrode diameters considered, the current-voltage characteristics of the plasma microdischarge are almost independent of the electrode material and the diameter of the electrodes. Predictions from a numerical model of the argon microdischarge compare favorably with the experimental measurements and the visualization studies. The atmospheric pressure plasma microdischarge can be used for deposition of thin films and for microfabrication.
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Details
- Title
- Atmospheric Pressure DC Plasma Microdischarges: A Characterization Study
- Creators
- Jeong W Yi - Drexel UniversityFang Yan - Drexel UniversityBakhtier Farouk - Drexel University
- Publication Details
- Heat Transfer: Volume 3, v 2003, pp 325-334
- Conference
- ASME 2003 Heat Transfer Summer Conference (Las Vegas, Nevada, United States, 21 Jul 2003–23 Jul 2003)
- Publisher
- ASMEDC
- Resource Type
- Conference proceeding
- Language
- English
- Academic Unit
- Mechanical Engineering and Mechanics
- Scopus ID
- 2-s2.0-1842787620
- Other Identifier
- 991019173685604721