Conference proceeding
Characterization and Modeling of Thermal Buckling in Eccentrically Loaded Microfabricated Nickel Beams for Adaptive Cooling
Microelectromechanical Systems, v 7, pp 689-698
01 Jan 2005
Abstract
The design, fabrication and testing of micromachined nickel beams buckling under thermal loading will be presented in this paper. The focus will be on characterizing key design parameters important to the implementation of electroplated nickel beams as the actuation mechanism in a thermally adaptive microvalve. An analytical model of the thermal buckling phenomena has been developed and validated with test results from electroplated nickel beams with slight eccentricities. Highly nonlinear deflection versus temperature curves were predicted by the closed form model and match well with experimental measurements. Buckling deflections of more than 50μm were achieved at actuation temperatures under 100°C. The nickel beam fabrication process will be presented, as well as various fabrication related issues impacting the actuation capabilities of the beams.
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3 citations in Scopus
Details
- Title
- Characterization and Modeling of Thermal Buckling in Eccentrically Loaded Microfabricated Nickel Beams for Adaptive Cooling
- Creators
- Matthew McCarthy - Columbia UniversityNicholas Tiliakos - Columbia UniversityVijay Modi - Columbia UniversityLuc Freche´tte - Columbia University
- Publication Details
- Microelectromechanical Systems, v 7, pp 689-698
- Conference
- ASME 2005 International Mechanical Engineering Congress and Exposition, Orlando, Florida, USA, Nov. 05 - 11, 2005
- Publisher
- ASMEDC
- Number of pages
- 10
- Resource Type
- Conference proceeding
- Language
- English
- Academic Unit
- Mechanical Engineering and Mechanics
- Web of Science ID
- WOS:000243038100108
- Scopus ID
- 2-s2.0-33645984245
- Other Identifier
- 991021934210704721
InCites Highlights
Data related to this publication, from InCites Benchmarking & Analytics tool:
- Web of Science research areas
- Engineering, Electrical & Electronic
- Engineering, Mechanical
- Instruments & Instrumentation