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Electrocapillary Piston Motion and a Prototype of Phase-Manipulating Micromirror
Conference proceeding

Electrocapillary Piston Motion and a Prototype of Phase-Manipulating Micromirror

Zhiliang Wan, Alan Feinerman, Gary Friedman, Hongjun Zeng and ASME
Microelectromechanical Systems, v 5, pp 451-455
01 Jan 2003

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Web of Science research areas
Engineering, Electrical & Electronic
Engineering, Mechanical
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