Conference proceeding
Electrocapillary Piston Motion and a Prototype of Phase-Manipulating Micromirror
Microelectromechanical Systems, v 5, pp 451-455
01 Jan 2003
Featured in Collection : UN Sustainable Development Goals @ Drexel
Abstract
In this paper we study the piston motion of a mercury droplet that is confined in a metal-plated micro-hole. This droplet is actuated by the electrocapillary effect and large displacements of up to 250μm are achieved with very low voltages (2V). We use a high-speed camera (10,000frames/s) to capture the piston motion and we find the resonance frequency is ~45Hz. The mercury droplet geometry in equilibrium state is analyzed based on Laplace equation and volume conservation. A mathematical model is developed and predicts a resonant frequency of mercury droplet and the value is found to be 119Hz. A prototype of piston-motion micromirror is also demonstrated in the experiment, with frequency of 400Hz and amplitude of ~8μm at 2V.
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Details
- Title
- Electrocapillary Piston Motion and a Prototype of Phase-Manipulating Micromirror
- Creators
- Zhiliang Wan - University of Illinois at ChicagoAlan Feinerman - University of Illinois at ChicagoGary Friedman - Drexel UniversityHongjun Zeng - University of Illinois at ChicagoASME
- Publication Details
- Microelectromechanical Systems, v 5, pp 451-455
- Conference
- ASME 2003 International Mechanical Engineering Congress and Exposition (Washington, District of Columbia, United States, 15 Nov 2003–21 Nov 2003)
- Publisher
- ASMEDC
- Resource Type
- Conference proceeding
- Language
- English
- Academic Unit
- Electrical and Computer Engineering
- Web of Science ID
- WOS:000222633100070
- Scopus ID
- 2-s2.0-1942488136
- Other Identifier
- 991019173455504721
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- Web of Science research areas
- Engineering, Electrical & Electronic
- Engineering, Mechanical