Conference proceeding
Evolving criteria for research facilities: vibration
Proceedings of SPIE, v 5933(1), pp 593303-5933013
18 Aug 2005
Abstract
The paper presents a review of generic vibration criteria used for vibration-sensitive technical facilities. The paper reviews the logic behind and evolution of the Vibration Criterion (VC) curves, originally known as the "BBN" criteria, and discusses the background of a generic criterion in common usage for nanotechnology, currently denoted NIST-A. The criteria are compared with representative types of research equipment and activities.
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94 citations in Scopus
Details
- Title
- Evolving criteria for research facilities: vibration
- Creators
- Hal Amick - Colin Gordon & AssociatesMichael Gendreau - Colin Gordon & AssociatesTodd Busch - Colin Gordon & AssociatesColin Gordon - Colin Gordon & Associates
- Publication Details
- Proceedings of SPIE, v 5933(1), pp 593303-5933013
- Conference
- Buildings for Nanoscale Research and Beyond
- Publisher
- Society of Photo-Optical Instrumentation Engineers (SPIE)
- Resource Type
- Conference proceeding
- Language
- English
- Academic Unit
- Computer Science (Computing)
- Scopus ID
- 2-s2.0-31744440126
- Other Identifier
- 991021868729404721