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Integrated optic distributed Bragg reflector Fabry-Perot modulator for microwave applications
Conference proceeding

Integrated optic distributed Bragg reflector Fabry-Perot modulator for microwave applications

W.J Zubrzycki, B.V Borges, P.R Herczfeld, S.H Kravitz, G.R Hadley, G.A Vawter, R.F Corless, R.E Smith, J.R Wendt, J.C Word, …
Proceedings of 1995 IEEE MTT-S International Microwave Symposium, v 1, pp 259-263
1995

Abstract

Distributed Bragg reflectors Fabry-Perot Gratings III-V semiconductor materials Integrated optics Mirrors Nanoscale devices Optical device fabrication Optical materials Optical modulation
An integrated optic Fabry-Perot modulator is considered. The device, fabricated on III-V materials, uses distributed Bragg reflectors as mirrors. The greatest technical challenge in the realization of this device was the fabrication of the gratings with nanometer feature sizes. First order gratings 0.09 /spl mu/m in width and of 0.8 /spl mu/m in depth were written on a 2 /spl mu/m wide rib waveguide and successfully etched. The design, fabrication, and performance of the device is discussed.< >

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Engineering, Electrical & Electronic
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