Conference proceeding
Multifield Analysis of a Piezoelectric Valveless Micropump
Mechanics of Solids, Structures and Fluids; Vibration, Acoustics and Wave Propagation, pp 361-369
01 Jan 2011
Featured in Collection : UN Sustainable Development Goals @ Drexel
Abstract
Coupled multifield analysis of piezoelectrically actuated valveless-micropump MEMS devices are carried out for liquid transport applications. We consider the three-way coupling between electrical, mechanical and fluidic fields in such systems where actuator deflection causes fluid flow through a micropump. Flow contraction and expansion (through a nozzle and a diffuser respectively) generates net fluid flow as the bilayer structural-piezoelectric membrane of the actuator deflects. The analysis involves structural and fluid field couplings in a sequential structural-fluid analysis of the microfluidic device. The effect of the driving voltage on silicon-PZT-5A membrane deflection and flow rate through the inlet/outlet is investigated via time averaging the predicted instantaneous velocity fields. At low actuation frequencies (below 10 kHz), the excitation voltage is a dominant factor on the flow rate of the micropump. The pressure, velocity and flow rate prediction models developed in the present study can be utilized to optimize the design of MEMS based micropumps.
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3 citations in Scopus
Details
- Title
- Multifield Analysis of a Piezoelectric Valveless Micropump
- Creators
- Ersin Sayar - Drexel UniversityBakhtier Farouk - Drexel University
- Publication Details
- Mechanics of Solids, Structures and Fluids; Vibration, Acoustics and Wave Propagation, pp 361-369
- Conference
- ASME 2011 International Mechanical Engineering Congress and Exposition (Denver, Colorado, 11 Nov 2011–17 Nov 2011)
- Series
- ASME 2011 International Mechanical Engineering Congress and Exposition; 8
- Publisher
- Amer Soc Mechanical Engineers
- Number of pages
- 9
- Resource Type
- Conference proceeding
- Language
- English
- Academic Unit
- Mechanical Engineering and Mechanics
- Web of Science ID
- WOS:000324956000046
- Scopus ID
- 2-s2.0-84869156225
- Other Identifier
- 991019170155804721
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InCites Highlights
Data related to this publication, from InCites Benchmarking & Analytics tool:
- Web of Science research areas
- Acoustics
- Engineering, Mechanical