Conference proceeding
Photodiode position sensors for integrated feedback control of a long-range micropositioner
2008 IEEE Sensors, pp 803-806
Oct 2008
Abstract
The demonstration of a photodiode-based position sensing mechanism for integrated feedback control of a long-range micropositioner is reported. Interdigitated aluminum-silicon photodiodes with a responsivity of 0.2 A/W have been integrated into a linear electrostatic micromotor supported on microball bearings. Using photodiode signals as feedback and implementing a proportional control law, closed-loop excitation of the device has been achieved. The microball bearings provide continuous long-range motion, while the feedback sensors and control scheme overcome the random nature of microscale rolling friction, leading to a robust positioning system with a range of 4 mm and a resolution of 120 mum. Accurate and reliable operation has been demonstrated, including referenced positioning from a device-defined origin and autonomous response to external disturbances. This is the first demonstration of position sensing and feedback control in a ball bearing supported MEMS device.
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Details
- Title
- Photodiode position sensors for integrated feedback control of a long-range micropositioner
- Creators
- M.I. Beyaz - University of Maryland, College ParkM. McCarthy - University of Maryland, College ParkN. Ghalichechian - University of Maryland, College ParkR. Ghodssi - University of Maryland, College Park
- Publication Details
- 2008 IEEE Sensors, pp 803-806
- Publisher
- IEEE
- Number of pages
- 4
- Resource Type
- Conference proceeding
- Language
- English
- Academic Unit
- Mechanical Engineering and Mechanics
- Scopus ID
- 2-s2.0-67649965320
- Other Identifier
- 991021934210104721