- Title
- RF Reactively Sputtered Aluminum Nitride Thin Films
- Creators
- N KumarK PourrezaeiB SinghR.J DeMaria
- Publication Details
- Sixth IEEE International Symposium on Applications of Ferroelectrics, pp 86-88
- Conference
- Sixth IEEE International Symposium on Applications of Ferroelectrics, 6th
- Publisher
- IEEE
- Number of pages
- 1
- Resource Type
- Conference proceeding
- Language
- English
- Academic Unit
- School of Biomedical Engineering, Science, and Health Systems
- Other Identifier
- 991019182757304721
Conference proceeding
RF Reactively Sputtered Aluminum Nitride Thin Films
Sixth IEEE International Symposium on Applications of Ferroelectrics, pp 86-88
1986
Abstract
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