Conference proceeding
Reconfigurable lithographic applications using polymer liquid crystal composite films - art. no. 673048
PHOTOMASK TECHNOLOGY 2007, PTS 1-3, v 6730, pp 73048-73048
01 Jan 2007
Abstract
The proposed application of holographically formed polymer dispersed liquid crystal (H-PDLC) thin films is a real-time dynamically reconfigurable mask for the resist exposure step in the photolithographic process. H-PDLC films, or thin periodic nanostructures of alternating layers of polymer and liquid crystal have unique electro-optic properties including the ability to modulate a particular wavelength as a function of bias applied to the film. The H-PDLC photomask device consists of patterned electrodes that form pixels with independent bias control over each segment. This is achieved by etching the optically clear yet electrically conductive indium-tin-oxide electrodes on the glass confining the H-PDLC film. This mask has been used to cure Shipley 1800 series positive photoresist at its peak sensitivity wavelength of 440 nm. Structures formed using the H-PDLC photornask device have been compared to similar structures formed with a static photomask using an optical profilometer. Near vertical walls have been achieved using the H-PDLC photomask for structures with line width of 260 mu m, and more narrow structures have been fabricated with resolution nearing 100 mu m. Line width between structures formed using the H-PDLC mask and static photornask differ by less than 15%. Additionally, morphology studies have been performed on developed regions of glass and resist formed using a static and an H-PDLC mask to demonstrate that no structural defects exist due to formation under an H-PDLC grating.
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1 citations in Scopus
Details
- Title
- Reconfigurable lithographic applications using polymer liquid crystal composite films - art. no. 673048
- Creators
- Anna E. Fox - Drexel UniversityAdam K. Fontecchio - Drexel University
- Contributors
- R J Naber (Editor)
- Publication Details
- PHOTOMASK TECHNOLOGY 2007, PTS 1-3, v 6730, pp 73048-73048
- Series
- PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE)
- Publisher
- Spie-Int Soc Optical Engineering
- Number of pages
- 10
- Resource Type
- Conference proceeding
- Language
- English
- Academic Unit
- Electrical and Computer Engineering
- Web of Science ID
- WOS:000253477000136
- Scopus ID
- 2-s2.0-40749092217
- Other Identifier
- 991020531816804721
InCites Highlights
Data related to this publication, from InCites Benchmarking & Analytics tool:
- Web of Science research areas
- Engineering, Electrical & Electronic
- Materials Science, Coatings & Films
- Optics