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Resonant cavity LEDs by lateral epitaxy
Conference proceeding

Resonant cavity LEDs by lateral epitaxy

Michael G Mauk, P. A Burch, Scott W Johnson, Zane A Shellenbarger, James B McNeely, Thomas A Goodwin and Bryan W Feyock
Proceedings of SPIE, v 3002(1), pp 59-66
04 Apr 1997

Abstract

Optical cavity light-emitting diode structures with 'buried' mirrors, and their fabrication by lateral epitaxy are described. Single-crystal, high-quality epitaxial layers are formed over substrates coated with patterned, reflective masks using liquid-phase or vapor-phase epitaxial lateral overgrowth processes. The reflecting mask acts as a backside mirror and forms an optical cavity leading to enhanced external quantum efficiencies. An AlGaAs optical cavity LED incorporating a refractory metal 'buried' mirror is assessed: a greater than 3-fold increase in output optical power is measured compared to control devices with no buried mirror. Application of the epitaxial overgrowth techniques to LED structures utilizing electron-beam deposited dielectric/semiconductor 'buried' mirrors and to other semiconductor materials, such as InGaAsSb, SiC, and ZnSe is described.

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Web of Science research areas
Engineering, Electrical & Electronic
Optics
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