Conference proceeding
Simulation of an atmospheric pressure methane-hydrogen micro-discharge for diamond like carbon (DLC) film deposition
2007 16th IEEE International Pulsed Power Conference, v 1, pp 728-731
Jun 2007
Featured in Collection : UN Sustainable Development Goals @ Drexel
Abstract
A hybrid model has been developed to simulate atmospheric pressure methane-hydrogen micro-discharge for diamond like carbon deposition. The simulation predicts CH 2 , CH 3 and C 2 H 2 as the predominant growth species for diamond like carbon deposition. A strong dependence of soot formation on gas temperature is observed. The results further indicates that the quality of the deposited film have strong dependence on discharge current.
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Details
- Title
- Simulation of an atmospheric pressure methane-hydrogen micro-discharge for diamond like carbon (DLC) film deposition
- Creators
- T Farouk - Department of Mechanical Engineering and Mechanics, Drexel University, Philadelphia, USAB Farouk - Drexel UniversityA Gutsol - Department of Mechanical Engineering and Mechanics, Drexel University, Philadelphia, USAA Fridman - Drexel UniversityIEEE
- Publication Details
- 2007 16th IEEE International Pulsed Power Conference, v 1, pp 728-731
- Publisher
- IEEE
- Resource Type
- Conference proceeding
- Language
- English
- Academic Unit
- Mechanical Engineering and Mechanics
- Web of Science ID
- WOS:000253619300165
- Other Identifier
- 991019168405904721
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InCites Highlights
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- Web of Science research areas
- Engineering, Electrical & Electronic
- Physics, Applied
- Physics, Nuclear