Conference proceeding
The selection and creation of the rules in rules-based optical proximity correction
2001 4TH INTERNATIONAL CONFERENCE ON ASIC PROCEEDINGS, pp 50-53
01 Jan 2001
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Abstract
Considering the efficiency and veracity of rules-based OPC applied to recent large-scale layout, we firstly point out the importance of the selection and creation of rules in rules-based OPC. Our discussion addresses the crucial factors in selecting and creating rules as well as how we select and create more concise and practical rules-base. Based on our ideas we suggest four primary rules and as a result we show some rule data in table. The automatic construction of the rules-base called OPCL is an important part of the whole rules-based OPC software.
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Details
- Title
- The selection and creation of the rules in rules-based optical proximity correction
- Creators
- R Shi - Tsinghua UniversityY CaiX L HongW M WuC Q Yang
- Contributors
- T TingAo (Editor)Y Huihua (Editor)A Wang (Editor)C K Cheng (Editor)
- Publication Details
- 2001 4TH INTERNATIONAL CONFERENCE ON ASIC PROCEEDINGS, pp 50-53
- Publisher
- IEEE
- Number of pages
- 4
- Resource Type
- Conference proceeding
- Language
- English
- Academic Unit
- Computer Science
- Web of Science ID
- WOS:000176369900003
- Other Identifier
- 991020638375004721
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- Engineering, Electrical & Electronic
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