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The study of a cell-based TSM piezoelectric sensor
Conference proceeding

The study of a cell-based TSM piezoelectric sensor

Kenneth Barbee, Sun Kwoun, Ryszard M Lec, Joseph Sorial and IEEE
PROCEEDINGS OF THE 2002 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM & PDA EXHIBITION, pp 260-267
2002

Abstract

Acoustic wave devices, piezoelectric and piezoresistive devices Applied sciences Electronics Exact sciences and technology Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices

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Web of Science research areas
Automation & Control Systems
Engineering, Electrical & Electronic
Engineering, Manufacturing
Optics
Physics, Applied
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