- Title
- Application of impedance analysis to reactive ion etching of silicon and Teflon
- Creators
- Min-Kyu Song
- Awarding Institution
- Drexel University
- Degree Awarded
- Doctor of Philosophy (Ph.D.)
- Publisher
- Drexel University; Philadelphia, Pennsylvania
- Number of pages
- xxi, 238 pages
- Resource Type
- Dissertation
- Language
- English
- Academic Unit
- Drexel University
- Other Identifier
- 991021888960404721
Dissertation
Application of impedance analysis to reactive ion etching of silicon and Teflon
Doctor of Philosophy (Ph.D.), Drexel University
1988
DOI:
https://doi.org/10.17918/00010341
Metrics
19 File views/ downloads
19 Record Views