A fully integrated Fabry-Perot interferometric sensor has been designed, fabricated and tested. The basic waveguiding structure was formed by K⁺-Na⁺ ion exchange from the molten salt. The resulting waveguide refractive index profile has been approximated by an exponential to allow solution of the wave equation. Microprobe analysis indicates this to be a reasonable assumption. Distributed Bragg reflectors have been used as internal mirrors. These reactive ion etched structures provided moderate reflectivities in the 23%-40%. Coupled mode formalism has been used in the modelling of these reflectors. Grating transfer functions were also experimentally determined for both gratings on the final device. These have been discussed in the light of the analytic system that was developed. The full sensing device has been demonstrated in both the bulk and evanescent modes. Temperature response was used to demonstrate bulk mode sensitivity. Separate control of the gratings' temperatures was found to be necessary. Evanescent sensitivity was demonstrated via a series of droplet experiments that involved a sequence of droplets of various sizes and refractive indices. The experimental results show the 'as made' device to be somewhat more sensitive than the equivalent Mach-Zehnder design.
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Details
Title
A fully integrated Fabry-Perot interferometric sensor having distributed feedback internal mirrors
Creators
James Francis Ryley Jr.
Contributors
Peter R. Herczfeld (Advisor) - Drexel University, Drexel University (1970-)
Awarding Institution
Drexel University
Degree Awarded
Doctor of Philosophy (Ph.D.)
Publisher
Drexel University; Philadelphia, Pennsylvania
Number of pages
xi, 121 pages
Resource Type
Dissertation
Language
English
Academic Unit
College of Engineering (1970-2026); Drexel University