Application of impedance analysis to reactive ion etching of silicon and Teflon

Dissertation

Open access

Min-Kyu Song

Doctor of Philosophy (Ph.D.), Drexel University

1988

DOI:

https://doi.org/10.17918/00010341

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Title: Application of impedance analysis to reactive ion etching of silicon and Teflon
Creators: Min-Kyu Song
Awarding Institution: Drexel University
Degree Awarded: Doctor of Philosophy (Ph.D.)
Publisher: Drexel University; Philadelphia, Pennsylvania
Number of pages: xxi, 238 pages
Resource Type: Dissertation
Language: English
Academic Unit: Drexel University
Other Identifier: 991021888960404721