Characterization and stabilization of atmospheric pressure DC microplasmas and their application to thin film deposition

Dissertation

Open access

David Alexander Staack

Doctor of Philosophy (Ph.D.), Drexel University

Dec 2008

DOI:

https://doi.org/10.17918/etd-2998

Files and links (1)

pdf

Staack_David_20085.43 MBDownload View

Plasma engineering

Thin film devices--Design and construction

Mechanical Engineering

68 File views/ downloads

30 Record Views

Title: Characterization and stabilization of atmospheric pressure DC microplasmas and their application to thin film deposition
Creators: David Alexander Staack - DU
Contributors: Bakhtier Farouk (Advisor) - Drexel University (1970-)
Alexander A. Fridman (Advisor) - Drexel University (1970-)
Awarding Institution: Drexel University
Degree Awarded: Doctor of Philosophy (Ph.D.)
Publisher: Drexel University; Philadelphia, Pennsylvania
Resource Type: Dissertation
Language: English
Academic Unit: College of Engineering (1970-2026); Mechanical Engineering (and Mechanics) [Historical]; Drexel University
Other Identifier: 2998; 991014632224104721