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Thesis
A method for atomic layer deposition of complex oxide thin films
Master of Science (M.S.), Drexel University
Dec 2012
DOI:
https://doi.org/10.17918/etd-4029
Abstract
Advanced technologies derive many of their capabilities from the advanced materials that they are made from. Complex oxides are a class of materials which are driving technological advancement in a host of different directions. These highly functional materials have a great variety of useful properties, which can be chosen and even engineered. Advanced materials require advanced deposition methods. Atomic layer deposition (ALD), a variant of chemical vapor deposition (CVD), is gaining more use in industry for its ability to provide ultra-high film thickness resolution (down to 0.1 nm), capability to conformally coat three-dimensional structures, and its high uniformity across large surface areas. Additionally, ALD processes provide a possibility to improve economic and environmental viability of the process as compared to CVD by using and wasting less toxic reactants and expelling fewer nano-particulate byproducts. ALD processes are highly mature for many binary oxides commonly used in the semiconductor industries, however processes for depositing heavy metal oxides and complex oxides - oxides containing two or more separate metallic cations - are sorely lacking in literature. The primary focus of this work is the development of a process for depositing the complex perovskite oxide lead titanate (PbTiO₃), an end group of the lead zirconate titanate family (PbZr_xTi_[1-x]O₃), which has valuable technical applications as well as serves as a template for applying this research into other material systems. The author gratefully acknowledges the Army Research Office (ARO) for their support of this project under the funding provided by Grant # W911NF-08-1-0067.
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Details
- Title
- A method for atomic layer deposition of complex oxide thin films
- Creators
- Brian Robert Beatty - DU
- Contributors
- Jonathan E. Spanier (Advisor) - Drexel University (1970-)
- Awarding Institution
- Drexel University
- Degree Awarded
- Master of Science (M.S.)
- Publisher
- Drexel University; Philadelphia, Pennsylvania
- Resource Type
- Thesis
- Language
- English
- Academic Unit
- Materials Science and Engineering; College of Engineering; Drexel University
- Other Identifier
- 4029; 991014632825404721