A process control technique for reactive sputtering using glow discharge mass spectrometry

Thesis

Nalin Kumar

Master of Science (M.S.), Drexel University

1985

DOI:

https://doi.org/10.17918/00006816

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Title: A process control technique for reactive sputtering using glow discharge mass spectrometry
Creators: Nalin Kumar
Awarding Institution: Drexel University
Degree Awarded: Master of Science (M.S.)
Publisher: Drexel University; Philadelphia, Pennsylvania
Number of pages: x, 108 pages
Resource Type: Thesis
Language: English
Academic Unit: Drexel University
Other Identifier: 991021888212804721