Deposition of Y-Ba-Cu-O thin films by RF magnetron sputtering of single composite targets

Thesis

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Thomas A. Begley

Master of Science (M.S.), Drexel University

1988

DOI:

https://doi.org/10.17918/00007995

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Title: Deposition of Y-Ba-Cu-O thin films by RF magnetron sputtering of single composite targets
Creators: Thomas A. Begley
Awarding Institution: Drexel University
Degree Awarded: Master of Science (M.S.)
Publisher: Drexel University; Philadelphia, Pennsylvania
Number of pages: ix, 102 pages
Resource Type: Thesis
Language: English
Academic Unit: Drexel University
Other Identifier: 991021888846904721