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PDFOpen Access (License Unspecified), Open Access
- Title
- Enhancement in thermal oxidation of silicon by ozone
- Creators
- Su Chen Chao
- Awarding Institution
- Drexel University
- Degree Awarded
- Master of Science (M.S.)
- Publisher
- Drexel University; Philadelphia, Pennsylvania
- Number of pages
- vii, 68 pages
- Resource Type
- Thesis
- Language
- English
- Academic Unit
- Drexel University
- Other Identifier
- 991021888778904721