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Francois_Michel_1986108.76 MB
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- Title
- Ion cluster beam deposition
- Creators
- Michel M. A. Francois
- Awarding Institution
- Drexel University
- Degree Awarded
- Master of Science (M.S.)
- Publisher
- Drexel University; Philadelphia, Pennsylvania
- Number of pages
- xi, 114 pages
- Resource Type
- Thesis
- Language
- English
- Academic Unit
- Drexel University
- Other Identifier
- 991021887543004721