Microstructure fabrication on silicon wafer and polyimide substrate using micromachining techniques

Thesis

Open access

Yong Li

Master of Science (M.S.), Drexel University

1994

DOI:

https://doi.org/10.17918/00008436

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Title: Microstructure fabrication on silicon wafer and polyimide substrate using micromachining techniques
Creators: Yong Li
Awarding Institution: Drexel University
Degree Awarded: Master of Science (M.S.)
Publisher: Drexel University; Philadelphia, Pennsylvania
Number of pages: ix, 95 pages
Resource Type: Thesis
Language: English
Academic Unit: Drexel University
Other Identifier: 991021888823904721