Piezoelectric lead zirconate titanate thin films sputter-deposited on metal substrates for micro-cantilever device application

Thesis

Open access

Suk-Hun Choi

Master of Science (M.S.), Drexel University

Aug 2002

DOI:

https://doi.org/10.17918/00009751

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Cathode sputtering (Plating process)

Metallic films

Piezoelectric materials

Chemical Engineering

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Title: Piezoelectric lead zirconate titanate thin films sputter-deposited on metal substrates for micro-cantilever device application
Creators: Suk-Hun Choi
Contributors: Young Hee Lee (Advisor) - Drexel University, Drexel University (1970-)
Wan Y. Shih (Advisor) - Drexel University, Drexel University (1970-)
Awarding Institution: Drexel University
Degree Awarded: Master of Science (M.S.)
Publisher: Drexel University; Philadelphia, Pennsylvania
Number of pages: xi, 103 pages
Resource Type: Thesis
Language: English
Academic Unit: Chemical (and Biological) Engineering [Historical]; College of Engineering (1970-2026); Drexel University
Other Identifier: 991021888744204721