A Microfabricated Spiral-Groove Turbopump Supported on Microball Bearings

Journal article

Open access

Peer reviewed

Christopher Mike WAITS, Matthew MCCARTHY and Reza GHODSSI

Journal of microelectromechanical systems, v 19(1), pp 99-109

2010

Files and links (1)

url

https://doi.org/10.1109/JMEMS.2009.2035525View

Published, Version of Record (VoR) Open

Micromechanical devices and systems

Mechanical instruments, equipment and techniques

Mechanical engineering. Machine design

Exact sciences and technology

Instruments, apparatus, components and techniques common to several branches of physics and astronomy

General

Applied sciences

Precision engineering, watch making

Physics

13 Record Views

20 citations in Scopus

Title: A Microfabricated Spiral-Groove Turbopump Supported on Microball Bearings
Creators: Christopher Mike WAITS - Sensors and Electron Devices Directorate, U.S. Army Research Laboratory, Adelphi, MD 20783, United States
Matthew MCCARTHY - Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139, United States
Reza GHODSSI - MEMS Sensors and Actuators Laboratory, Department of Electrical and Computer Engineering, Institute for Systems Research, University of Maryland, College Park, MD 20742, United States
Publication Details: Journal of microelectromechanical systems, v 19(1), pp 99-109
Publisher: Institute of Electrical and Electronics Engineers; New York, NY
Resource Type: Journal article
Language: English
Academic Unit: Mechanical Engineering and Mechanics
Web of Science ID: WOS:000274213700010
Scopus ID: 2-s2.0-76349098212
Other Identifier: 991014878616304721

Data related to this publication, from InCites Benchmarking & Analytics tool:

Collaboration types: Domestic collaboration
Web of Science research areas: Engineering, Electrical & Electronic; Instruments & Instrumentation; Nanoscience & Nanotechnology; Physics, Applied