Journal article
A novel inductive technique for microcantilever displacement detection
Theoretical and applied mechanics letters, v 1(3), pp 1-6
2011
Featured in Collection : UN Sustainable Development Goals @ Drexel
Abstract
A novel inductive technique for the detection of microcantilever displacement for sensing applications was presented. We highlight the basic structure and evaluate its characteristics with the aid of modeling and simulation. Results generated by numerical simulations using ANSOFT are compared with those obtained from an equivalent circuit model using PSPICE. There are indications that the sensitivity of the inductive cantilever is about one order of magnitude higher as compared to piezoresistive silicon cantilevers of the same dimension under the same cantilever bending.
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Details
- Title
- A novel inductive technique for microcantilever displacement detection
- Creators
- Madhu Santosh K Mutyala - Louisiana Tech UniversityHai-Feng Ji - Drexel UniversityJi Fang - Louisiana Tech UniversityKody Varahramyan - University of Indianapolis
- Publication Details
- Theoretical and applied mechanics letters, v 1(3), pp 1-6
- Publisher
- Elsevier
- Resource Type
- Journal article
- Language
- English
- Academic Unit
- Chemistry
- Web of Science ID
- WOS:000437259600006
- Scopus ID
- 2-s2.0-85038368739
- Other Identifier
- 991019330807504721
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- Collaboration types
- Domestic collaboration
- Web of Science research areas
- Mechanics