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A novel inductive technique for microcantilever displacement detection
Journal article   Open access   Peer reviewed

A novel inductive technique for microcantilever displacement detection

Madhu Santosh K Mutyala, Hai-Feng Ji, Ji Fang and Kody Varahramyan
Theoretical and applied mechanics letters, v 1(3), pp 1-6
2011
url
https://doi.org/10.1063/2.1103106View
Published, Version of Record (VoR) Open

Abstract

coupling coefficient inductance magnetic field
A novel inductive technique for the detection of microcantilever displacement for sensing applications was presented. We highlight the basic structure and evaluate its characteristics with the aid of modeling and simulation. Results generated by numerical simulations using ANSOFT are compared with those obtained from an equivalent circuit model using PSPICE. There are indications that the sensitivity of the inductive cantilever is about one order of magnitude higher as compared to piezoresistive silicon cantilevers of the same dimension under the same cantilever bending.

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Collaboration types
Domestic collaboration
Web of Science research areas
Mechanics
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