A rotary microactuator supported on encapsulated microball bearings using an electro-pneumatic thrust balance

Journal article

Peer reviewed

Matthew MCCARTHY, C. Mike WAITS, Mustafa I BEYAZ and Reza GHODSSI

Journal of micromechanics and microengineering, v 19(9), pp 094007-094007 (7)

2009

Additional Links

Micromechanical devices and systems

Transducers

Mechanical instruments, equipment and techniques

Bearings, bushings, rolling bearings

Exact sciences and technology

Drives

Precision engineering, watch making

Physics

General equipment and techniques

Mechanical engineering. Machine design

Instruments, apparatus, components and techniques common to several branches of physics and astronomy

General

Applied sciences

13 Record Views

21 citations in Scopus

Title: A rotary microactuator supported on encapsulated microball bearings using an electro-pneumatic thrust balance
Creators: Matthew MCCARTHY - Mechanical Engineering Department, Massachusetts Institute of Technology, Cambridge, MA 02139, United States
C. Mike WAITS - US Army Research Laboratory, Adelphi, MD 20783, United States
Mustafa I BEYAZ - MEMS Sensors and Actuators Laboratory, Department of Electrical and Computer Engineering, Institute for Systems Research, University of Maryland, College Park, MD 20742, United States
Reza GHODSSI - MEMS Sensors and Actuators Laboratory, Department of Electrical and Computer Engineering, Institute for Systems Research, University of Maryland, College Park, MD 20742, United States
Publication Details: Journal of micromechanics and microengineering, v 19(9), pp 094007-094007 (7)
Publisher: Institute of Physics; Bristol
Resource Type: Journal article
Language: English
Academic Unit: Mechanical Engineering and Mechanics
Web of Science ID: WOS:000269474500008
Scopus ID: 2-s2.0-70350645339
Other Identifier: 991014877822904721

Data related to this publication, from InCites Benchmarking & Analytics tool:

Collaboration types: Domestic collaboration
Web of Science research areas: Engineering, Electrical & Electronic; Instruments & Instrumentation; Nanoscience & Nanotechnology; Physics, Applied