Journal article
A scalable multi-modal attention-based framework for Good-Die-In-Bad-Neighborhood screening in semiconductor manufacturing
Microprocessors and microsystems, v 124, p105308
Jul 2026
Abstract
Outgoing quality optimization in advanced semiconductor manufacturing is increasingly constrained by defects that escape detection under conventional test flows and rule-based screening. Good-Die-in-Bad-Neighborhood (GDBN) techniques exploit spatial defect locality to address this challenge, yet existing learning-based approaches rely predominantly on wafer-level visual features and often exhibit limited robustness under product and process variability. This paper presents a scalable multi-modal attention-based GDBN framework that jointly models localized spatial context and numerical test parametric behavior to enable neighborhood-aware defect screening. The proposed architecture operates on compact 3×3 die-level receptive fields and employs attention-guided feature extraction with late fusion, delivering strong discriminative capability with low computational overhead suitable for high-volume manufacturing. Experiments on the industrial WM-811K dataset show that the proposed multi-modal framework captures up to 2×more test escapes and achieves up to a 22% normalized incremental DPPM reduction relative to state-of-the-art GDBN methods in a single-product setting. Extensive multi-product and leave-one-product-out evaluations further demonstrate that a substantial fraction of these quality gains is preserved across heterogeneous wafer sizes and defect distributions, confirming strong scalability and generalizability. These results establish multi-modal attention-based GDBN as an effective and scalable solution for high-volume, multi-product semiconductor test quality optimization.
•Proposes a novel multi-modal attention-based data fusion architecture.•Captures up to 2×more test escapes and a 22% DPPM reduction compared to state-of-the-art GDBN screening methods.•Evaluation across multiple products, demonstrating scalability and yield–quality trade-offs.
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Details
- Title
- A scalable multi-modal attention-based framework for Good-Die-In-Bad-Neighborhood screening in semiconductor manufacturing
- Creators
- Mohammad Ershad Shaik - The University of Texas at AustinAbhishek Mishra - Drexel UniversityNagarajan Kandasamy - Drexel UniversityNur A. Touba - The University of Texas at Austin
- Publication Details
- Microprocessors and microsystems, v 124, p105308
- Publisher
- Elsevier B.V; AMSTERDAM
- Number of pages
- 13
- Resource Type
- Journal article
- Language
- English
- Academic Unit
- Electrical and Computer Engineering
- Web of Science ID
- WOS:001826225900001
- Other Identifier
- 991022197041304721