Journal article
Aluminum Oxide Passivating Tunneling Interlayers for Molybdenum Oxide Hole-Selective Contacts
IEEE journal of photovoltaics, v 10(3), pp 722-728
01 May 2020
Featured in Collection : UN Sustainable Development Goals @ Drexel
Abstract
Aluminum oxide thin films fabricated via atomic layer deposition are introduced as passivating tunneling interlayers between hole-selective molybdenum oxide contacts and silicon absorbers. Surface recombination velocity and specific contact resistivity are reported as a function of Al2O3 thickness. The effects of substrate chemical pretreatment, the thermal history of the Al2O3 layers prior to MoOx deposition, and the thermal history of the completed Al2O3/MoOx stacks were also investigated. When an SiOx/Al2O3 passivating stack was incorporated and the completed test structure was annealed at 200 degrees C, the observed recombination velocities were reduced from similar to 10 000 cm/s for an unpassivated (initially hydrogen-terminated) Si/MoOx direct contact to similar to 500 cm/s, while maintaining a contact resistivity at or below 0.1 omega center dot cm(2). The data demonstrate the capability of ultrathin Al2O3 to improve Si/MoOx contact properties and may be of interest in the design of future Si heterojunctions.
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Details
- Title
- Aluminum Oxide Passivating Tunneling Interlayers for Molybdenum Oxide Hole-Selective Contacts
- Creators
- Benjamin E. Davis - Lehigh UniversityNicholas C. Strandwitz - Lehigh UniversityLehigh Univ., Bethlehem, PA (United States)
- Publication Details
- IEEE journal of photovoltaics, v 10(3), pp 722-728
- Publisher
- IEEE
- Number of pages
- 7
- Grant note
- DE-EE0008176 / U.S. Department of Energy's Office of Energy Efficiency and Renewable Energy under the Solar Energy Technology Office Award; United States Department of Energy (DOE)
- Resource Type
- Journal article
- Language
- English
- Academic Unit
- A.J. Drexel Nanomaterials Institute
- Web of Science ID
- WOS:000530407300002
- Scopus ID
- 2-s2.0-85083916181
- Other Identifier
- 991021881401404721
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InCites Highlights
Data related to this publication, from InCites Benchmarking & Analytics tool:
- Web of Science research areas
- Energy & Fuels
- Materials Science, Multidisciplinary
- Physics, Applied