Journal article
An Automated Setup for Depositing Sensitive Coatings on the Surfaces of Solid-State Sensors
Instruments and experimental techniques (New York), v 61(5), pp 753-756
01 Sep 2018
Abstract
The design of an automated setup for depositing functional polymers on the surfaces of gas-sensitive solid-state sensors is described. It is based on the irrigation method, which is the most effective technique. The results of experiments on the deposition of films of functional polymers on the surface of a sensor on surface acoustic waves with an operating frequency of 170 MHz are presented. It is shown that the use of the developed equipment makes it possible to reduce the spread of the characteristics of the obtained sensors, in particular, in the initial mass load from 9.9 to 2.8%, and also to improve the static and dynamic characteristics of the sensors.
Metrics
2 Record Views
Details
- Title
- An Automated Setup for Depositing Sensitive Coatings on the Surfaces of Solid-State Sensors
- Creators
- A. V. Maslennikov - Nizhny Novgorod State Pedagogical UniversityI. L. Zubkov - Nizhny Novgorod State Pedagogical UniversityLeonid A Zubkov - School of Biomedical Engineering, Science, and Health Systems (1997-)
- Publication Details
- Instruments and experimental techniques (New York), v 61(5), pp 753-756
- Publisher
- Springer Nature
- Number of pages
- 4
- Grant note
- 14.577.21.0144 / Ministry of Education and Science of the Russian Federation; Ministry of Education and Science, Russian Federation
- Resource Type
- Journal article
- Language
- English
- Academic Unit
- School of Biomedical Engineering, Science, and Health Systems; Drexel University
- Web of Science ID
- WOS:000445896400021
- Scopus ID
- 2-s2.0-85053882635
- Other Identifier
- 991019323774304721
InCites Highlights
Data related to this publication, from InCites Benchmarking & Analytics tool:
- Web of Science research areas
- Engineering, Multidisciplinary
- Instruments & Instrumentation