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Journal article
Angular magnetic field dependence of a doubly clamped magnetoelectric resonator
Applied physics letters, v 123(6), 062901
07 Aug 2023
Abstract
Angular dependence of magnetic field response of fully suspended resonant microelectromechanical double-clamped magnetoelectric beams was investigated as the basis for a vector magnetometer utilizing the magnetically induced change in fundamental resonance frequency. Strain-coupled magnetostrictive iron cobalt (FeCo) and piezoelectric aluminum nitride layers together constitute a magnetoelectric heterostructure with a high magnetic field sensitivity of 70Hz/mT along the beam axis and a transfer function of 47V/T at 10Hz. The fundamental frequency shift to an external magnetic field is found to be strongly anisotropic with a relative variation of more than 3% between perpendicular and parallel field orientations with respect to the long axis of the beam at a field of 100mT. This design can form the basis for an on-chip high sensitivity vector magnetometer operating with ultra-low power when multiplexed with two or more resonators.
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Details
- Title
- Angular magnetic field dependence of a doubly clamped magnetoelectric resonator
- Creators
- Thomas Mion - United States Naval Research LaboratoryBenjamin M. Lefler - Drexel Univ, Dept Mat Sci & Engn, Philadelphia, PA 19104 USAMargo Staruch - United States Naval Research LaboratorySteven Bennett - US Naval Res Lab, Mat Sci & Technol Div, 4555 Overlook Ave SW, Washington, DC 02375 USANorman Gottron - Carnegie Mellon UniversitySamuel E. Lofland - Rowan UniversityKonrad Bussmann - United States Naval Research LaboratoryNicholas Gangemi - United States Naval Research LaboratoryJeffrey Baldwin - United States Naval Research LaboratoryPeter Finkel - United States Naval Research Laboratory
- Publication Details
- Applied physics letters, v 123(6), 062901
- Publisher
- AIP Publishing
- Number of pages
- 6
- Grant note
- American Society for Engineering Education Naval Research Enterprise Internship Program (NREIP) U.S. Office of Naval Research through the Naval Research Laboratory's basic research program; United States Department of Defense; United States Navy; Office of Naval Research U.S. Naval Research Laboratory postdoctoral fellowship program
- Resource Type
- Journal article
- Language
- English
- Academic Unit
- Mechanical Engineering and Mechanics
- Web of Science ID
- WOS:001066561700004
- Scopus ID
- 2-s2.0-85168130363
- Other Identifier
- 991021861178404721
InCites Highlights
Data related to this publication, from InCites Benchmarking & Analytics tool:
- Collaboration types
- Domestic collaboration
- Web of Science research areas
- Physics, Applied