Anisotropic etching of SiC whiskers

Journal article

Peer reviewed

Goknur Z CAMBAZ, Gleb N YUSHIN, Yury GOGOTSI and Vadim G LUTSENKO

Nano letters, v 6(3), pp 548-551

2006

PMID: 16522060

Additional Links

Whiskers and dendrites (growth, structure, and nonelectronic properties)

Exact sciences and technology

Condensed matter: structure, mechanical and thermal properties

Microelectronic fabrication (materials and surfaces technology)

Electronics

Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing

Design. Technologies. Operation analysis. Testing

Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)

Physics

Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices

Integrated circuits

General equipment and techniques

Instruments, apparatus, components and techniques common to several branches of physics and astronomy

General

Applied sciences

12 Record Views

110 citations in Scopus

Title: Anisotropic etching of SiC whiskers
Creators: Goknur Z CAMBAZ - Department of Materials Science and Engineering, Drexel University, 3141 Chestnut Street Lebow Building, Room 344, Philadelphia, Pennsylvania 19104, United States
Gleb N YUSHIN - Department of Materials Science and Engineering, Drexel University, 3141 Chestnut Street Lebow Building, Room 344, Philadelphia, Pennsylvania 19104, United States
Yury GOGOTSI - Department of Materials Science and Engineering, Drexel University, 3141 Chestnut Street Lebow Building, Room 344, Philadelphia, Pennsylvania 19104, United States
Vadim G LUTSENKO - V.I. Vernadski Institute of General and Inorganic Chemistrym Ukrainian National Academy of Sciences, 32/34 Prospekt Palladina, 03680 Kiev, Ukraine
Publication Details: Nano letters, v 6(3), pp 548-551
Publisher: American Chemical Society; Washington, DC
Resource Type: Journal article
Language: English
Academic Unit: Materials Science and Engineering
Web of Science ID: WOS:000236049800042
Scopus ID: 2-s2.0-33645384234
Other Identifier: 991014878194304721

Data related to this publication, from InCites Benchmarking & Analytics tool:

Collaboration types: Domestic collaboration; International collaboration
Web of Science research areas: Chemistry, Multidisciplinary; Chemistry, Physical; Materials Science, Multidisciplinary; Nanoscience & Nanotechnology; Physics, Applied; Physics, Condensed Matter