Atmospheric pressure methane-hydrogen dc micro-glow discharge for thin film deposition

Journal article

Peer reviewed

T FAROUK, B FAROUK, A GUTSOL and A FRIDMAN

Journal of physics. D, Applied physics, v 41(17), pp 175202-175202 (19)

2008

Additional Links

Physics of gases, plasmas and electric discharges

Plasma simulation

Hybrid methods

Other gas discharges

Physics of plasmas and electric discharges

Optical (ultraviolet, visible, infrared) measurements

Plasma diagnostic techniques and instrumentation

Electric discharges

Exact sciences and technology

Glow; corona

Physics

10 Record Views

46 citations in Scopus

Title: Atmospheric pressure methane-hydrogen dc micro-glow discharge for thin film deposition
Creators: T FAROUK - Department of Mechanical Engineering and Mechanics, Drexel University, Philadelphia, PA 19104, United States
B FAROUK - Department of Mechanical Engineering and Mechanics, Drexel University, Philadelphia, PA 19104, United States
A GUTSOL - Department of Mechanical Engineering and Mechanics, Drexel University, Philadelphia, PA 19104, United States
A FRIDMAN - Department of Mechanical Engineering and Mechanics, Drexel University, Philadelphia, PA 19104, United States
Publication Details: Journal of physics. D, Applied physics, v 41(17), pp 175202-175202 (19)
Publisher: Institute of Physics; Bristol
Resource Type: Journal article
Language: English
Academic Unit: Mechanical Engineering and Mechanics
Web of Science ID: WOS:000258680500038
Scopus ID: 2-s2.0-54749118149
Other Identifier: 991014878226104721

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