Atomic-scale Feedback-controlled Electron Beam Fabrication of 2D Materials

Matthew Boebinger; Sudhajit Misra; Yiling Yu; Kai Xiao; Tyler Mathis; Yury Gogotsi; Andrew R. Lupini; Sergei Kalinin; Stephen Jesse; Raymond Unocic

doi:10.1017/S1431927621010631

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Atomic-scale Feedback-controlled Electron Beam Fabrication of 2D Materials

Matthew Boebinger, Sudhajit Misra, Yiling Yu, Kai Xiao, Tyler Mathis, Yury Gogotsi, Andrew R. Lupini, Sergei Kalinin, Stephen Jesse and Raymond Unocic

Microscopy and microanalysis, v 27(S1), pp 3072-3073

Aug 2021

DOI: https://doi.org/10.1017/S1431927621010631

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Abstract

Exploring Beam-sample Interactions for Uncovering the Atomic or Dynamic Nature of Matter

Physical Sciences Symposia

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Title: Atomic-scale Feedback-controlled Electron Beam Fabrication of 2D Materials
Creators: Matthew Boebinger - Oak Ridge National Laboratory
Sudhajit Misra - Oak Ridge National Laboratory
Yiling Yu - 1Oak Ridge National Laboratory, United States
Kai Xiao - Oak Ridge National Laboratory
Tyler Mathis - Drexel University
Yury Gogotsi - Drexel University
Andrew R. Lupini - Oak Ridge National Laboratory
Sergei Kalinin - Oak Ridge National Laboratory
Stephen Jesse - Oak Ridge National Laboratory
Raymond Unocic - Oak Ridge National Laboratory
Publication Details: Microscopy and microanalysis, v 27(S1), pp 3072-3073
Publisher: Cambridge University Press
Number of pages: 2
Resource Type: Journal article
Language: English
Academic Unit: Materials Science and Engineering
Other Identifier: 991019186792304721

Atomic-scale Feedback-controlled Electron Beam Fabrication of 2D Materials

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