Journal article
Chemical liquid deposition process for microstructure fabrication
Materials in engineering, Vol.26(8), pp.670-679
2005
Abstract
Scientists and engineers are currently moving into a new era to develop precise and intelligent mini-structures and microsystems. The study of mini-structures and microsystems is a rapidly growing area of research with a great potential to accomplish useful tasks in numerous applications. In this paper, a new fabrication technology for microstructures based on the chemical liquid deposition (CLD) is presented. This technology is based on the following principles: micro-droplets of a cold (room temperature) solution or liquid reactant are sprayed from a nozzle and make contact with a hot substrate, the droplets will evaporate, decompose, or react, and then the reacted solid products will deposit on the substrate. By controlling the motion of the nozzle and the spray time, a desired 3D microstructure of the deposited material can be formed through a layer-by-layer scanning technique. The working principle, available materials as well as the process control and modeling is discussed and some preliminary results are presented.
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Details
- Title
- Chemical liquid deposition process for microstructure fabrication
- Creators
- Jack G Zhou - Department of Mechanical Engineering and Mechanics, Drexel University, 3141 Chestnut Street, Philadelphia, PA 19104, USAAnthony Addison - Chemistry Department, Drexel University, 3141 Chestnut Street, Philadelphia, PA 19104, USAZongyan He - Department of Mechanical Engineering and Mechanics, Drexel University, 3141 Chestnut Street, Philadelphia, PA 19104, USAFeng Wang - Department of Mechanical Engineering and Mechanics, Drexel University, 3141 Chestnut Street, Philadelphia, PA 19104, USA
- Publication Details
- Materials in engineering, Vol.26(8), pp.670-679
- Publisher
- Elsevier
- Resource Type
- Journal article
- Language
- English
- Academic Unit
- Mechanical Engineering and Mechanics
- Identifiers
- 991014877816704721
InCites Highlights
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- Web of Science research areas
- Materials Science, Multidisciplinary