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Closed-loop control of a long-range micropositioner using integrated photodiode sensors
Journal article   Peer reviewed

Closed-loop control of a long-range micropositioner using integrated photodiode sensors

Mustafa Ilker Beyaz, Matthew McCarthy, Nima Ghalichechian and Reza Ghodssi
Sensors and actuators. A. Physical., v 151(2)
2009
DOI: https://doi.org/10.1016/j.sna.2009.02.020

Abstract

Micropositioners Feedback sensors MEMS Photodiodes Closed-loop control
Closed-loop control of an electrostatically actuated micropositioner using integrated feedback sensors is reported. A photodiode-based position sensing mechanism has been incorporated into a variable-capacitance micromotor supported on microball bearings with a range of 4 mm and a resolution of 120 μm. Accurate and reliable positioning has been demonstrated using a proportional control law and the effect of the proportionality constant has been investigated for various stepping distances and actuation voltages. A minimum settling time of 0.1 s was achieved for a 1 mm step at 150 V. Closed-loop excitation has enabled sustained synchronous motion and a maximum speed of 20.4 mm/s. This is a noted improvement compared to open-loop excitation, which exhibits erratic motion and a maximum speed of 7.2 mm/s. Using feedback control, two critical functions for robust positioning have been demonstrated; the micropositioner can establish a necessary frame of reference and autonomously respond to arbitrary disturbances. The closed-loop position control system presented in this work illustrates the feasibility and functionality of smart microsystems using integrated feedback sensors.

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Web of Science research areas
Engineering, Electrical & Electronic
Instruments & Instrumentation
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