Cu sputtering and deposition by off-normal, near-threshold Cu+ bombardment: Molecular dynamics simulations

Journal article

Peer reviewed

Cameron F Abrams and David B Graves

Journal of applied physics, v 86(4), pp 2263-2267

15 Aug 1999

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44 citations in Scopus

Title: Cu sputtering and deposition by off-normal, near-threshold Cu+ bombardment: Molecular dynamics simulations
Creators: Cameron F Abrams
David B Graves
Publication Details: Journal of applied physics, v 86(4), pp 2263-2267
Publisher: American Institute of Physics (AIP)
Resource Type: Journal article
Language: English
Academic Unit: Chemical and Biological Engineering
Web of Science ID: WOS:000081720600075
Scopus ID: 2-s2.0-0001030504
Other Identifier: 991014969857404721

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