- Title
- Determination of unknown stress states in silicon wafers using microlaser Raman spectroscopy
- Creators
- S. Narayanan - Department of Materials Engineering, Drexel University, United StatesSurya R. Kalidindi - Department of Materials Engineering, Drexel University, United StatesLinda S. Schadler - Dept. of Mat. Sci. and Engineering, Rensselaer Polytechnic Institute, United States
- Publication Details
- Journal of applied physics, v 82(5), pp 2595-2602
- Publisher
- AIP Publishing
- Number of pages
- 8
- Resource Type
- Journal article
- Language
- English
- Academic Unit
- Materials Science and Engineering; College of Engineering
- Web of Science ID
- WOS:A1997XT82100081
- Scopus ID
- 2-s2.0-0031237190
- Other Identifier
- 991014632201304721
Journal article
Determination of unknown stress states in silicon wafers using microlaser Raman spectroscopy
Journal of applied physics, v 82(5), pp 2595-2602
01 Sep 1997
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- Collaboration types
- Domestic collaboration
- Web of Science research areas
- Physics, Applied