- Title
- Diffusion of implanted Ge and Sn in β-Ga2O3
- Publication Details
- JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v 37(5), 51204
- Resource Type
- Journal article
- Language
- English
- Academic Unit
- Drexel University
- Web of Science ID
- WOS:000492054300008
- Scopus ID
- 2-s2.0-85071599705
- Other Identifier
- 991021860694404721
Journal article
Diffusion of implanted Ge and Sn in β-Ga2O3
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v 37(5), 51204
Sep 2019
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- Collaboration types
- Industry collaboration
- Domestic collaboration
- International collaboration
- Web of Science research areas
- Engineering, Electrical & Electronic
- Nanoscience & Nanotechnology
- Physics, Applied