- Title
- Effects of reactor pressure on two-dimensional radio-frequency methane plasma : a numerical study
- Creators
- K Bera - Drexel UniversityB Farouk - Drexel UniversityY. H Lee - Drexel University
- Publication Details
- Plasma sources science & technology, v 8(3), pp 412-420
- Publisher
- Institute of Physics
- Resource Type
- Journal article
- Language
- English
- Academic Unit
- Mechanical Engineering and Mechanics
- Web of Science ID
- WOS:000082320500013
- Scopus ID
- 2-s2.0-0032654111
- Other Identifier
- 991019168028304721
Journal article
Effects of reactor pressure on two-dimensional radio-frequency methane plasma : a numerical study
Plasma sources science & technology, v 8(3), pp 412-420
1999
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- Web of Science research areas
- Physics, Fluids & Plasmas