Journal article
Electrocapillary piston motion and a prototype of phase-manipulating micromirror
Journal of microelectromechanical systems, v 13(4), pp 620-627
01 Aug 2004
Featured in Collection : UN Sustainable Development Goals @ Drexel
Abstract
In this paper, we study the piston motion of a mercury droplet that is confined in a metal-plated microhole. This droplet is actuated by the electrocapillary effect and large displacements of up to 210 mum are achieved with very low voltages (~2 V). We use a high-speed camera (10,000 frames/s) to capture the piston motion and we find the resonance frequency is ~50 Hz. The mercury droplet geometry in equilibrium state is analyzed based on Laplace equation and volume conservation. A mathematical model is developed; it predicts that the resonant frequency of mercury droplet is 150 Hz. A prototype of piston-motion micromirror is also demonstrated in the experiment, with a frequency of 400 Hz and amplitude of ~8 mum at 2 V.
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Details
- Title
- Electrocapillary piston motion and a prototype of phase-manipulating micromirror
- Creators
- Zhi-Liang WanA Feinerman - University of Illinois at ChicagoHong-Jun ZengG Friedman - Drexel University
- Publication Details
- Journal of microelectromechanical systems, v 13(4), pp 620-627
- Publisher
- The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
- Resource Type
- Journal article
- Language
- English
- Academic Unit
- Electrical and Computer Engineering
- Web of Science ID
- WOS:000223180200009
- Scopus ID
- 2-s2.0-4344708331
- Other Identifier
- 991019168192504721
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InCites Highlights
Data related to this publication, from InCites Benchmarking & Analytics tool:
- Collaboration types
- Domestic collaboration
- Web of Science research areas
- Engineering, Electrical & Electronic
- Instruments & Instrumentation
- Nanoscience & Nanotechnology
- Physics, Applied