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Enhanced detection resonance frequency shift of a piezoelectric microcantilever sensor by a DC bias electric field in humidity detection
Journal article   Open access   Peer reviewed

Enhanced detection resonance frequency shift of a piezoelectric microcantilever sensor by a DC bias electric field in humidity detection

Qing Zhu, Wan Y Shih and Wei-Heng Shih
Sensors and actuators. B, Chemical, v 138(1), pp 1-4
2009
PMID: 20161253
url
https://doi.org/10.1016/j.snb.2009.01.035View
Published, Version of Record (VoR) Open

Abstract

Young's modulus Frequency shift Piezoelectric microcantilever sensor Enhancement Domain switching DC bias
We have examined the relative longitudinal flexural resonance frequency shift of a PMN–PT/tin PEMS with a DC bias electric field, E, in humidity detection. We showed that the relative resonance frequency shift could be enhanced by applying an E to the PMN–PT layer during detection. A maximum enhancement of more than three times in resonance frequency shift was observed at E = −6 kV/cm as compared to the resonance frequency shift without a bias field. The maximal relative resonance frequency shift at E = −6 kV/cm was about 1000 times larger than could be accounted for by mass loading alone.

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17 citations in Scopus

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Web of Science research areas
Chemistry, Analytical
Electrochemistry
Instruments & Instrumentation
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