Journal article
Examining pressure-induced phase transformations in silicon by spherical indentation and Raman spectroscopy: A statistical study
Journal of materials research, v 19(10), pp 3099-3108
01 Oct 2004
Featured in Collection : UN Sustainable Development Goals @ Drexel
Abstract
Unloading rate and maximum load have been previously shown to affect the response of silicon to sharp indentation, but no such study exists for spherical indentation. In this work, a statistical analysis of over 1900 indentations made with a 13.5-μm radius spherical indenter on a single-crystal silicon wafer over a range of loads (25–700 mN) and loading/unloading rates (1–30 mN/s) is presented. The location of “pop-in” and “pop-out” events, most likely due to pressure-induced phase transformations, is noted, as well as pressures at which they occur. Multiple occurrences of pop-in and pop-out events are reported. Raman micro-spectroscopy shows a higher intensity of metastable silicon phases at some depth under the surface of the residual impression, where the highest shear stresses are present. A stability range for Si-II is demonstrated and compared with previous results for Berkovich indentation.
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Details
- Title
- Examining pressure-induced phase transformations in silicon by spherical indentation and Raman spectroscopy: A statistical study
- Creators
- Tom Juliano - A.J. Drexel Nanotechnology Institute and Department of Materials Science and Engineering, Drexel University, Philadelphia, Pennsylvania 19104Vladislav Domnich - A.J. Drexel Nanotechnology Institute and Department of Materials Science and Engineering, Drexel University, Philadelphia, Pennsylvania 19104Yury Gogotsi - A.J. Drexel Nanotechnology Institute and Department of Materials Science and Engineering, Drexel University, Philadelphia, Pennsylvania 19104
- Publication Details
- Journal of materials research, v 19(10), pp 3099-3108
- Publisher
- Cambridge University Press; New York, USA
- Number of pages
- 10
- Resource Type
- Journal article
- Language
- English
- Academic Unit
- Materials Science and Engineering
- Web of Science ID
- WOS:000224213900041
- Scopus ID
- 2-s2.0-6344256622
- Other Identifier
- 991014970031304721
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- Web of Science research areas
- Materials Science, Multidisciplinary