Journal article
Fabrication of microcoil/microsprings for novel chemical and biological sensing
Sensors and actuators. B, Chemical, v 123(2), pp 937-941
2007
Featured in Collection : UN Sustainable Development Goals @ Drexel
Abstract
This paper reports the fabrication of a novel microsensor structure using inductively coupled plasma source (ICP) dry etching process. The novel sensor is based on a SiO
2/Si/SU-8 trilayered microcoil/microspring structure. The diameter of the microcoil was approximately 600
μm. The ICP process and SU-8 exposing time are discussed. The SiO
2 layer can be conveniently modified according to typical silica surface modification procedures. The microcoils could expand or contract upon interaction of specific species in the environment with receptors on the SiO
2 surface due to the surface stress or energy applied on the SiO
2 surface of the microcoil. This microcoil device may be widely used in biomedical and chemical sensing applications.
Metrics
Details
- Title
- Fabrication of microcoil/microsprings for novel chemical and biological sensing
- Creators
- Yangqing LuHai-Feng Ji
- Publication Details
- Sensors and actuators. B, Chemical, v 123(2), pp 937-941
- Publisher
- Elsevier
- Resource Type
- Journal article
- Language
- English
- Academic Unit
- Chemistry
- Web of Science ID
- WOS:000247060100042
- Scopus ID
- 2-s2.0-34247646943
- Other Identifier
- 991014878204604721
UN Sustainable Development Goals (SDGs)
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Source: SDGs in the Output
InCites Highlights
Data related to this publication, from InCites Benchmarking & Analytics tool:
- Web of Science research areas
- Chemistry, Analytical
- Electrochemistry
- Instruments & Instrumentation