Journal article
High-Yield Ti3C2Tx MXene-MoS2 Integrated Circuits
Advanced materials (Weinheim), Vol.34(48), 2107370
01 Dec 2022
PMID: 34719808
Abstract
It is very challenging to employ solution-processed conducting films in large-area ultrathin nanoelectronics. Here, spray-coated Ti3C2Tx MXene films as metal contacts are successfully integrated into sub-10 nm gate oxide 2D MoS2 transistor circuits. Ti3C2Tx films are spray coated on glass substrates followed by vacuum annealing. Compared to the as-prepared sample, vacuum annealed films exhibit a higher conductivity (approximate to 11 000 S cm(-1)) and a lower work function (approximate to 4.5 eV). Besides, the annealed Ti3C2Tx film can be patterned through a standard cleanroom process without peeling off. The annealed Ti3C2Tx film shows a better band alignment for n-type transport in MoS2 channel with small work function mismatch of 0.06 eV. The MoS2 film can be uniformly transferred on the patterned Ti3C2Tx surface and then readily processed through the cleanroom process. A large-area array of Ti3C2Tx MXene-MoS2 transistors is fabricated using different dielectric thicknesses and semiconducting channel sizes. High yield and stable performance for these transistor arrays even with an 8 nm-thick dielectric layer are demonstrated. Besides, several circuits are demonstrated, including rectifiers, negative-channel metal-oxide-semiconductor (NMOS) inverters, and voltage-shift NMOS inverters. Overall, this work indicates the tremendous potential for solution-processed Ti3C2Tx MXene films in large-area 2D nanoelectronics.
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Details
- Title
- High-Yield Ti3C2Tx MXene-MoS2 Integrated Circuits
- Creators
- Xiangming Xu - King Abdullah University of Science and TechnologyTianchao Guo - King Abdullah University of Science and TechnologyMrinal K. Hota - King Abdullah University of Science and TechnologyHyunho Kim - King Abdullah University of Science and TechnologyDongxing Zheng - King Abdullah University of Science and TechnologyChen Liu - King Abdullah University of Science and TechnologyMohamed Nejib Hedhili - King Abdullah University of Science and TechnologyRajeh S. Alsaadi - King Abdullah University of Science and TechnologyXixiang Zhang - King Abdullah University of Science and TechnologyHusam N. Alshareef - King Abdullah University of Science and Technology
- Publication Details
- Advanced materials (Weinheim), Vol.34(48), 2107370
- Publisher
- Wiley
- Number of pages
- 12
- Grant note
- King Abdullah University of Science and Technology (KAUST); King Abdullah University of Science & Technology
- Resource Type
- Journal article
- Language
- English
- Academic Unit
- Materials Science and Engineering
- Web of Science ID
- WOS:000726312300001
- Scopus ID
- 2-s2.0-85120471547
- Other Identifier
- 991022059817204721