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Homoepitaxial growth of Ti–Si–C MAX-phase thin films on bulk Ti 3SiC 2 substrates
Journal article   Peer reviewed

Homoepitaxial growth of Ti–Si–C MAX-phase thin films on bulk Ti 3SiC 2 substrates

P. Eklund, A. Murugaiah, J. Emmerlich, Zs Czigàny, J. Frodelius, M.W. Barsoum, H. Högberg and L. Hultman
Journal of crystal growth, v 304(1)
2007

Abstract

A1. Scanning electron microscopy A1. Transmission electron microscopy A1. X-ray diffraction A3. Physical vapor deposition processes B1. Carbides B1. Nanomaterials
Ti 3SiC 2 films were grown on polycrystalline Ti 3SiC 2 bulk substrates using DC magnetron sputtering. The crystallographic orientation of the film grains is shown to be determined by the respective substrate-grain orientation through homoepitaxial MAX-phase growth. For a film composition close to Ti:Si:C=3:1:2, the films predominantly consist of MAX phases, both Ti 3SiC 2 and the metastable Ti 4SiC 3. Lower Si content resulted in growth of TiC with Ti 3SiC 2 as a minority phase. Thus, MAX-phase heterostructures with preferred crystallographic relationships can also be realized.

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Collaboration types
Domestic collaboration
International collaboration
Web of Science research areas
Crystallography
Materials Science, Multidisciplinary
Physics, Applied
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